You're probably OK to start now. After you've drained the tap water & filled with RODI, any remaining vinegar would be so dilute that it wouldn't be harmful. The hydrogen peroxide is probably not needed unless there is some organic build-up you are worried about. The vinegar, and the chlorine in the tap water, likely killed anything you need to worry about.
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John,
Current Tank Info: In-process, 90 Gallon SPS Reef
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